Filtered cathodic vacuum Arc deposition of nano-layered composite coatings for machining hard-to-cut materials
نویسندگان
چکیده
منابع مشابه
Deposition of permalloy films by filtered cathodic vacuum arc
The filtered cathodic vacuum arc technique was employed to deposit magnetic films such as FeNi on silicon substrate. Using the normal cathode design, tetrahedral amorphous carbon and metals films can be deposited. If a magnetic target is used, the arc spot always preferably moves to the edge of the target and then extinguishes. Therefore, the arc is not stable and no film can be deposited. A ca...
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A dual-cathode arc plasma source was combined with a computer-controlled bias amplifier to synchronize substrate bias with the pulsed production of plasma. In this way, bias can be applied in a material-selective way. The principle has been applied to the synthesis of metal-doped diamondlike carbon films, where the bias was applied and adjusted when the carbon plasma was condensing and the subs...
متن کاملEvaluation of tribological properties of (Ti,Al)CN/DLC composite coatings deposited by cathodic arc method.
In this study, Ti, Al and N doped DLC – referred to here after as “(Ti,Al)CN/DLC composite”- coating and pure diamond-like coating (DLC) were produced by cathodic arc deposition technique and the effects of the coating thickness on their tribological properties were evaluated. The coatings were characterized, using scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffrac...
متن کاملProperties of nitrogen doped tetrahedral amorphous carbon films prepared by filtered cathodic vacuum arc technique
The properties of nitrogen doped tetrahedral amorphous carbon films prepared by the filtered cathodic vacuum arc technique have been studied. The doping species, nitrogen ions, were produced by an ion beam source. The nitrogen flow rate was varied from 0.5 to 10 sccm while keeping other deposition conditions constant. The nitrogen content in deposited films was determined by Rutherford backscat...
متن کاملCyclic Voltammetric Behavior of Nitrogen-Doped Tetrahedral Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc
Nitrogen-doped tetrahedral amorphous carbon (ta-C :N) films were deposited by filtered cathodic vacuum arc (FCVA) technique using nitrogen as a background gas. The structure of the ta-C :N films was studied with X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy in terms of nitrogen flow rate used during the film deposition. Potential windows of the films measured in deaerated and un...
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ژورنال
عنوان ژورنال: The International Journal of Advanced Manufacturing Technology
سال: 2015
ISSN: 0268-3768,1433-3015
DOI: 10.1007/s00170-015-7821-8